MEMS汽車壓力傳感器的長期穩(wěn)定性測試與失效模式分析

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2.The13th Research Instituteof China Electronics Technology Group Corporation，Shijiazhuang O5ooo0，China）

【Abstract】Aiming at the problemof insuffcient long-term stability of automotive pressure sensors，thisarticle proposes a suspended sealing structure design， adopts the aluminum alloy - ceramic composite packaging process， combined with the temperaturecompensationalgorithm.Through theconstruction of anacceleratedaging testplatform with temperatureandpressrecycles for testing，theresults showthat this designreduces the temperature drift from ± 1.8%FS to ±0.28%FS .The output attenuation after 5Oo hours of pressure cycling isless than 0.5% FS.Failure analysis showsthat interface delaminationisthe main problem，accountingfor 62% .Theshear strengthisincreasedby 37% after optimization with a O.5mm silica gel buffer layer.

【Key words】MEMS pressure sensor;long-term stability；ceramic packaging；temperature compensation algorithm; failure mode analysis

0 引言

在汽車電子控制系統(tǒng)中，壓力傳感器作為發(fā)動機管理、制動系統(tǒng)等核心模塊的感知單元，其長期穩(wěn)定性直接影響行車安全與系統(tǒng)可靠性。（剩余3764字）