面向微小氣體流量的臨界流噴嘴校準(zhǔn)方法實(shí)驗(yàn)研究

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中圖分類號：TB9 文獻(xiàn)標(biāo)志碼：A 文章編號：1674-5124(2025)06-0075-06

Experimental investigation on critical flow nozzle calibration method for micro gas flow

ZHU Xiaoyi， GAO Shan， CAO Peng, CUI Lishui (National Institute ofMetrology,Beijing 10o029, China)

Abstract: The critical flow nozzle is widely used in the gas flow measurement due to its simple structure, no movable parts,stableperformance,high accuracy and other advantages.It is used as a reference meter to transfer the quantity value to other flowmeters. The micro-critical flow nozle has unique advantages in the micro-gas flow metrology with increasing social demand. However,due to the lack of traceability methods for micro-critical flow nozles,the traceability of micro-critical flow nozzles cannot be effectively guaranteed. This paper proposes a calibration method of micro-critical flow nozzle based on the piston prover gas flow standard facility and evaluates the uncertainty of the calibration results.Four micro-critical flow nozzles are selectedasthe transfer standardsandare calibrated basedon the piston prover facilityand thepVTt facility. The consistency of the calibration results verifies the reliability of the critical flow nozzle calibration method based on the piston prover gas flow standard facility.

Keywords: micro gas flow; critical flow nozzle; calibration method; piston prover gas flow standard facility; uncertainty

0 引言

近年來，伴隨航空航天、半導(dǎo)體芯片、生物醫(yī)藥、精細(xì)化工和環(huán)境監(jiān)測等國家重點(diǎn)領(lǐng)域的快速發(fā)展，各領(lǐng)域?qū)Ω邷?zhǔn)確度水平的微小氣體流量計(jì)的需求顯著增多，微小氣體流量計(jì)的量值傳遞及溯源問題也日漸凸顯[1-5]。（剩余10944字）